JPH0255337B2 - - Google Patents

Info

Publication number
JPH0255337B2
JPH0255337B2 JP60247487A JP24748785A JPH0255337B2 JP H0255337 B2 JPH0255337 B2 JP H0255337B2 JP 60247487 A JP60247487 A JP 60247487A JP 24748785 A JP24748785 A JP 24748785A JP H0255337 B2 JPH0255337 B2 JP H0255337B2
Authority
JP
Japan
Prior art keywords
conveyance
transported
pallet
transport
linear motor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60247487A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61150924A (ja
Inventor
Takehisa Nitsuta
Yoshio Saito
Ichiro Fukuwatari
Seiju Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Kiden Kogyo Ltd
Hitachi Ltd
Original Assignee
Hitachi Kiden Kogyo Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Kiden Kogyo Ltd, Hitachi Ltd filed Critical Hitachi Kiden Kogyo Ltd
Priority to JP24748785A priority Critical patent/JPS61150924A/ja
Publication of JPS61150924A publication Critical patent/JPS61150924A/ja
Publication of JPH0255337B2 publication Critical patent/JPH0255337B2/ja
Granted legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00Non-mechanical conveyors not otherwise provided for
    • B65G54/02Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic

Landscapes

  • Non-Mechanical Conveyors (AREA)
JP24748785A 1985-11-05 1985-11-05 搬送装置 Granted JPS61150924A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24748785A JPS61150924A (ja) 1985-11-05 1985-11-05 搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24748785A JPS61150924A (ja) 1985-11-05 1985-11-05 搬送装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP12917283A Division JPS6019614A (ja) 1983-07-14 1983-07-14 搬送装置

Publications (2)

Publication Number Publication Date
JPS61150924A JPS61150924A (ja) 1986-07-09
JPH0255337B2 true JPH0255337B2 (en]) 1990-11-27

Family

ID=17164195

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24748785A Granted JPS61150924A (ja) 1985-11-05 1985-11-05 搬送装置

Country Status (1)

Country Link
JP (1) JPS61150924A (en])

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56108625A (en) * 1980-01-29 1981-08-28 Yamaha Motor Co Ltd Linear motor conveyer
JPS6019614A (ja) * 1983-07-14 1985-01-31 Hitachi Ltd 搬送装置

Also Published As

Publication number Publication date
JPS61150924A (ja) 1986-07-09

Similar Documents

Publication Publication Date Title
JPH06156730A (ja) 搬送装置
JP2581066B2 (ja) ウエ−ハ搬送方法及び装置
US4718539A (en) Conveyor means
JP3956605B2 (ja) 物体の浮揚状態での荷取り方法
JPH0724415A (ja) 物体浮揚装置及び該装置を具備した物体搬送装置並びに物体浮揚方法
JPH07137824A (ja) 物体浮揚装置及び該装置を具備した物体搬送装置並びに物体浮揚方法
JPH0255337B2 (en])
JPH0144610B2 (en])
JPS59138523A (ja) リニアモ−タによる搬送物の移送制御方法
JPH0422812B2 (en])
JP3552793B2 (ja) 物体搬送装置
JPH07242317A (ja) 物体浮揚装置を具備した物体搬送装置
JP4882726B2 (ja) 枚葉基板搬送方法及び枚葉基板搬送装置
JPH0638427Y2 (ja) 磁気浮上型ウエハ搬送装置
JPS6392205A (ja) 真空装置用磁気浮上搬送装置
JPS6326343Y2 (en])
JPS62264846A (ja) 無接触推進装置
JPS61150925A (ja) ウエハ−のリニアモ−タ搬送装置
JPS59124623A (ja) 搬送装置
JPH042462B2 (en])
JPS6019613A (ja) 搬送方法
JPS6374816A (ja) 搬送装置
JPH07137822A (ja) 物体浮揚装置を具備した物体搬送装置並びに物体搬送方法
JP3393660B2 (ja) 搬送装置
JPH08282842A (ja) 空気浮上式リニアモータ駆動搬送路における分岐装置